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The vitality source is intended to generate a plasma wherein the gases are broken down and more complex chemistries occur. Reichle, Henry G. (May 1969), The Effect of Several Infrared Transparent Broadening Gases on the Absorption of Infrared Radiation in the 15 μm Band of Carbon Dioxide (PDF), High Altitude Engineering Laboratory, p.
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“Integrated Cleanroom Process for the Vapor Deals-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Films”. Stassen, Ivo; Styles, Mark; Grenci, Gianluca; Gorp, Hans Van; Vanderlinden, Willem; De Feyter, Vape Atomizer Steven; Falcaro, Paolo; De Vos, Dirk; Vereecken, Philippe; Ameloot, Rob (March 2016). “Chemical vapour deposition of zeolitic imidazolate framework skinny movies”. 4 March 1994, Weyauwega, Wisconsin, U.S.
21 June 2019, Philadelphia, Pennsylvania, U.S. Gleason, Karen; Ayse Asatekin; Miles C. Barr; Samaan H. Baxamusa; Kenneth K.S. Lau, Kenneth K. S.; Caulfield, vapor store Jeffrey A.; Gleason, Karen K. (1 October 2000). “Structure and Morphology of Fluorocarbon Films Grown by Hot Filament Chemical Vapor Deposition”. Shareef, I. A.; Rubloff, G. W.; Anderle, M.; Gill, W. N.; Cotte, J.; Kim, D. H. (1995-07-01). “Subatmospheric chemical vapor store deposition ozone/TEOS process for SiO2 trench filling”.